Authors:
- Umfassende Darstellung der Fertigungsverfahren und Technologien bei der Herstellung mikroelektronischer Schaltungen.
- Kokurrenzlos günstig.
Part of the book series: Teubner Studienbücher Technik (TSTT)
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Table of contents (13 chapters)
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Front Matter
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Back Matter
About this book
Reviews
Elektronik, 11/2003
About the author
Bibliographic Information
Book Title: Silizium-Halbleitertechnologie
Authors: Ulrich Hilleringmann
Series Title: Teubner Studienbücher Technik
DOI: https://doi.org/10.1007/978-3-322-94119-0
Publisher: Vieweg+Teubner Verlag Wiesbaden
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eBook Packages: Springer Book Archive
Copyright Information: Springer Fachmedien Wiesbaden 2002
eBook ISBN: 978-3-322-94119-0
Edition Number: 3
Number of Pages: XIII, 309
Number of Illustrations: 201 b/w illustrations
Topics: Electronics and Microelectronics, Instrumentation, Electrical Engineering