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- Mikroelektronik, Mikromechanik, Mikrooptik, Sensoren und Aktuatoren - Bausteine der Mikrosystemtechnik
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Table of contents (7 chapters)
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Bibliographic Information
Book Title: Mikrosystemtechnik
Book Subtitle: Prozessschritte, Technologien, Anwendungen
Authors: Ulrich Hilleringmann
DOI: https://doi.org/10.1007/978-3-8351-9022-1
Publisher: Vieweg+Teubner Verlag Wiesbaden
eBook Packages: Computer Science and Engineering (German Language)
Copyright Information: Vieweg+Teubner Verlag | Springer Fachmedien Wiesbaden GmbH, Wiesbaden 2006
Softcover ISBN: 978-3-8351-0003-9Published: 25 April 2006
eBook ISBN: 978-3-8351-9022-1Published: 13 February 2008
Edition Number: 1
Number of Pages: X, 274
Topics: Electrical Engineering, Electronics and Microelectronics, Instrumentation, Applied and Technical Physics