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1. Invited papers
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K Hennig
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Martin Setvak
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24 |
I.B Khaibullin and V.Yu Petukhov
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29 |
I Ursu, I.N Mihailescu, A.M. Prokhorov and V.L. Konov
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39 |
A.V. Dvurechenskii, R. Grötzschel and V.P. Popov
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44 |
Jan Kaozmarek and Witold Rosiaskl
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50 |
B Rauschenbach
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56 |
W. Pompe, G. Keßler, M. Klose, H.J Scheibe, S. Becker, H.J. Dietze and G. Seifert
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62 |
K.-H. Heinig and H.-J. Mueller
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69 |
G. Serfozo, R Naujokaitis, I. Krafcsik, L. Dozca, G. Battistig, P. Ridl, E. Klopfer, N. N. Gerasimenko and J. Gyulai
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74 |
E. Wieser, D Gerisch and V. Kahlert
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80 |
P.L.F. Hemment and K.J. Reeson
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87 |
A. Turos
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99 |
Masaya Iwaki
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104 |
G. Marest, S. Faveiule, W Mowcoffre and J. Tousset
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110 |
V.P Ageev, V.I Konov, A.I. Maslakov, V. M. Jlel’nikov and L.V Vellkov
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116 |
F.G. Rüdenauer
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124 |
F Fujimoto and M. Satou
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131 |
S.V. Gaponov and M.D. Strikovsky
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140 |
2. Implantation into silicon
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M. Posselt and W. Skorupa
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146 |
K Holldack and H. Kerkow
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149 |
K Holldack and H Kerkow
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152 |
J. K. N. Lindner and E. te Kaat
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155 |
M. Voelskow, W. Skorupa and J. Matthsi
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158 |
W. Skorupa, E. Wieser, R. Grötzschel, M. Posselt, A. Armigliato, A. Garulli, A. Bèyer and W Markgraf
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161 |
N. Hecking and E. te Kaat
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164 |
J. Langner, K. Czaus, E Gdrski, M. Gryziriski, A. Horodefiski, J. Pibkoszswski, C. Pochrybniak, Z Warner and M. Wojtowicz
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167 |
B. Schmidt, U. Kreißig, H Münzer and E. Rost
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170 |
R.F Konopleva, I.V. Nazarkin, V.A Evaeev, B.A Borisov and V.A Chekanov
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173 |
3. Implantation and annealing of compound semiconductor
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T. Bachmann, J. Kleemann, W. Wesch and G. Götz
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177 |
D Panknin, C.E Richter, M Gericke and Ya.V. Fattachov
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181 |
J Herold, W Wesch, G. Götz and H. Bartsch
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184 |
A Jordanov, W Wesch and K Gartner
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187 |
D. Panknin, E. Wieser, Ya.V. Fattachov and I.B Khaibullin
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190 |
J. Grno
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193 |
J Krynicki, A. Kozanecki, A. Olszewski and R. Grötzschel
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196 |
D. Baither, H. Bartsch and D. Panknin
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200 |
P. Thiele
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204 |
4. Implantation into metals
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V. Heera and B. Rauschenbach
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207 |
S.P Bugaev, Yu.R Kolobov, A.D Korotaev and A.O Savchenko
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210 |
J Jagielski, G. Gawlik, A. Podgorski and W. Zielinski
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213 |
G. Gawlik, J. Jagielski and A. Podgorski
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216 |
Jun Sasaki and Masaya Iwaki
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219 |
Y. Fukui, Y. Hirose and M. Iwaki
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222 |
V.P. Goltsev, V.V Khodasevich, V.V Uglov, G. Götz, K. Berndt and V. Bayer
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225 |
B Rauschenbach and G. Leonhardt
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228 |
H. Reuther, E. Richter, M. Fujinami and Y. Ujihira
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231 |
Gerhard Dienel, Andreas Kolitsch, Edgar Richter and Uwe Scholz
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234 |
Roland Kuohler and Edgar Riohter
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237 |
A Unkroth, G Götz, U Heiber and W. Andrä
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240 |
G. Linker, A Seidel and B. Strehlau
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244 |
C. Blochwitz and B. Rauschenbach
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247 |
L.C Nistor, V Tedorescu, G. Dinca and R. Medianu
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250 |
5. Transient heat treatment of semiconductors
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W Andra, I. Brylowska and G Gotz
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253 |
V.P Popov, S.S. Shaimeev, A.V Dvurechenski and L.V. Sovronov
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256 |
Ya.V Fattachov, R.M Bayazitov, I.B Khaibullin, E.M Misyuryov and M.A. Mchitarov
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259 |
V.S Budishevsky, R. Grotzschel, V.A Kagadey, N.I. Lebedeva, D.I. Proskurovsky and E.B. Yankelevich
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262 |
D Hoehl
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265 |
H. Johansen, H. Bartsch and B. Lammel
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268 |
J. Hlavka, J. Grno, J Dragula and M. Libesny
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271 |
R Koegler and E. Wieser
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274 |
N Sieber and D Proskurovsky
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278 |
R. Kogler, E. Wieser, A. Armigliato, E. Landi and S Solmi
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281 |
V.A Samujlov and V.F Stelmakh
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285 |
V.F Stelmateh, Tu.R Suprun-Belevich and A.R. Chelyadinskii
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288 |
N.I. Berezhov, A.R Chelyadinskii, Yu.R. Suprun-Belevich, N.L. Prokhorenko, A.K. Polonin and N.T. Kvasov
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291 |
N. L. Prokhorenko and Tu. R Suprtm-Belevich
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294 |
P. P. Partta
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297 |
B Canut, J. Pivot, D. Barbier, G. Chaussemy and J-F. Joly
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300 |
J Felba, K Friedel and K Przybecki
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303 |
V.P Popov, A.V Dvurechenskii and Yu.A Manjosov
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306 |
V.A. Pilipovich, E.I. Gatskevich and V.L. Malevich
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309 |
Z Werner, J. Piekoszbwski, C. Pochrybniak, Z. Haratym and A Sulik
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312 |
J. Piekoszewski, Z. Ulbrner, C. Pochrybniak, J. Langnar and A. Horoderiski
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315 |
D. Baither, R. Koegler and E. Wieeer
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318 |
F. Gaiseanu, M Bazu and L Galateanu
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321 |
J-M Dilhac and A. Martinez
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324 |
6. Formation of silicides
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Geza Valyi, Christine Dehrn, Heiner Ryssel and Wolfhard Möller
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327 |
I Kasko, K. Gartner and G Gotz
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335 |
A Witzmann, C. Kaschner, K. Gärtner and G Götz
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338 |
V.Yu Petukhov, I.B. Khaibullin, M.M Zaripov, E. Wieser and R Groetzschel
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341 |
E Wieser, Ch Weise, E. Vetter and Th Gessner
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344 |
B. Canut, M Cadri, J Pivot and A. Deneuville
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347 |
V.Yu. Petukhov, I.B. Khaibullin, N.V. Kurbatova, E. Wieser and R. Grötzschel
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350 |
E D’Anna, G Leggieri, A. Luches and M Martino
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7. Ion beam assisted deposition and ion beam mixing
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I. R Chakarov and D. S. Karpuzov
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357 |
Zs. J. Horvcith, B. Pecz and E Jaroli
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360 |
A.A Deshkovskaya, V.P. Komar, J.V Skornyakov, G.P. Pimenova and V. J. Ovchinnikov
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363 |
Kiyoshi Ogata, Yasunori Andoh and Eiji Karaijo
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366 |
K Hohmuth, R. Grotzschel and B Rauschenbach
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369 |
Z.A. Iskanderova, T.D Radjabov, R.Yu. Leiderman and F.K Tukfatullin
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372 |
W. Pompe, M. Bobeth and Yu.V Trushin
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375 |
E. Hensel, R. Grotzschel, U. Scholz and E. Richter
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378 |
K. Paprocki, J. Brylowska, W. Szyszko, P Jaworska and M. Subotowicz
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381 |
8. Deposition, modification and structurization
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E Venkova, K. Kostov, S. Georgieva and I. Katardjiev
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384 |
V.Yu Petukhov, I.Z. Ilaldinov, I.B Khaibullin and K. Wollschlager
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387 |
G. Oertel and W. Henrion
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390 |
T. Szorenyi, K. Piglmayer and D. Bauerle
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393 |
K. Bali, T Szorenyi and I Hevesi
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396 |
B.A Budkevich, I.A Ges, S.P Zhvavyj, G.D Ivlev, V.A Pilipovich and I.M Romanov
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399 |
B. Schultrich, H.-J. Scheibe, G. Kebler, M Ermrich, H Muller and W. Hauffe
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402 |
A. Richter
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405 |
S Veilmar, Th. Schlegel, W Pompe and W Brunner
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408 |
R. Wünsch, H.-J Scheibe, H.J Weiß and W. Resch
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411 |
W. Ross, H. Beyer and S. Völlmar
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414 |
A. Richter, A.E Romanov, W Pompe and V.l. Vladimirov
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417 |
T Izumi, M. Shibuyta, T. Hirao, T Kamada and T. Matsumori
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420 |
9. Silicon on insulator (SOI)
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N. Winkler, W Andrä, E. Glaser and G. Andrä
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423 |
W. Skorupa, K. Wollschlager, M Voelskow, H. Bartsch, O. Albrecht and J. Gotz
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427 |
H.U Jäger, J.A. Kilner, R.J. Chater, P.L.F. Hemment, R.F. Peart and K.J. Reeson
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430 |
H. U. Jäger
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433 |
H.-J. Muller and K.-H. Heinig
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436 |
N. Sieber and G. Otto
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439 |
H.H. Richter, B. Tillack, R. Banisch, H. Andrä and W. Weinelt
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443 |
R Banisch, B Tillack, B. Hunger, P. Barna, J. Gyulai, M. Adam and V. Schiller
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446 |
E. Sobeslavsky, H. U. Jager, W Skorupa and K. Wollschlager
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450 |
S. Wagner, F Neubert, Th Ottoj, U. Kreifiig and J. Schoneich
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453 |
M Wagner, G Andrä, E. Glaser, G Götz and H. Bartsch
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457 |
K.-H. Heinig and H.-J. Mueller
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460 |
K.-H. Heinig and H.-J. Mueller
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464 |
K. Haberger, P. Panish, R Buchner, H Steinberger and R. Bower
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468 |
J Danilowitsch, K. Gärtner, G Gotz and B. Weber
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471 |
10. Diagnostics and ion microfocus beam
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F. Machalett, R. Mühle and J. Stiebritz
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474 |
R Mühle, F. Machalett and J. Stiebritz
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477 |
J Bollmann, A Mertens and H. Klose
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479 |
S. Unterricker
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482 |
H. U. Marquardt, U. Gunst and B. Muller
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485 |
K. Kiszczak, A. Latuszyriski, D. Mgczka and A. Podgörski
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489 |
S. Bederka, I. Bello, V Dubravcova, J. Grno, R. Harmann, J. Janik, V. Kral, V. Kremnican, J Mraz, A. Ritomsky, J. Durcansky, I. Grellneth and V. Illich
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492 |
I.A Glushtsov, V.I Korzjuk, Y.A Podlipko and A.I Urbanovitch
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495 |
U Kreibig, A. Kahn, F.G Rüdenauer and W. Steiger
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498 |
H.-O. Dietze, S. Becker and W. Pompe
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501 |
A. Schindler, R. Fechner, R. Flagmeyer, D. Panknin, F Bigl and G. Otto
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503 |
M Setvak, Z Hulek, O Voltr, Z Haba, R Salomonovic, A Sibl and O Krai
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506 |
11. Fundamentals
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M. Posselt and G. Otto
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508 |
A. Schonborn, N. Hecking and E. te Kaat
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511 |
Andrzej Dygo and Andrzej Turos
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514 |
W Szyszko, K. Paprocki and J. Sielank
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517 |
D Stock and H.-D. Geiler
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521 |
V.Yu Balandin, A.V. Dvurechenskii and L.N Aleksandrov
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524 |
H. Bartsch, D Hoehl and P. Werner
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527 |
M. Rabirtski
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530 |
S.P. Zhvavyi and O.L. Sadovskaja
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533 |
G.D. Ivlev and V.V. Zhidkov
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536 |
D. Wolff and H.D. Geiler
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539 |
H . - D Geiler and G. Götz
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542 |
O. Bostanjoglo, R. P. Tornow and W. Tornow
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545 |
V .Yu Balandin, A .V Dvurechensk and L .N Aleksaridrov
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548 |
O .A Kuljasova, V .Yu Balandin, A .V Dvurechensk and L .N Aleksandrov
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551 |
12. Miscellaneous
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M. Kalitzova, N. Pashov, D Karpuzov, P Werner, H. Bartsch and G Vitali
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554 |
G. Mende, M. Deutscher, H.J. Doring, H Flietner and B Scfimidt
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557 |
V.A. Dorosinetz, N.A Poklonski, V.A Samujlov and V.F Stelmakh
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560 |
A.M. Zaitsev, V.S Varichenko, A.A. Melnikov and V.F. Steimakh
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563 |
V.S Varichenko, A.M Zaitsev, A.A. Melnikov and V.F. Stelmach
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566 |
Rainer Behrisch
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569 |
H.E. Schaefer, R. Wurschum, R Birringer and H Gleiter
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580 |
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592 |
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595 |