EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR

Published by De Gruyter 1989

EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR

Edited by: Karl Hohmuth and Edgar Richter

Volume 13 in the series Physical Research

https://doi.org/10.1515/9783112575666

Contents

Frontmatter Publicly Available Download PDF	I
CONTENTS Publicly Available Download PDF	1
INVITED PAPERS
EXCIMER LASER ASSISTED DEPOSITION OF SiO₂-STRUCTURES ON SEMICONDUCTOR SUBSTRATES FROM SILICONORGANIC FILMS V. . Ageev, Quoc Chung Oang, V. I. Konov, A. V. Kuzmichov, A. I. Maslakov, L. V. Velikov and D. Yu. Zaroslov Requires Authentication Unlicensed Licensed Download PDF	19
SYNTHESIS OF COMPOUNDS IN SEMICONDUCTORS BY THE IMPLANTATION OF REACTIVE IONS P. L. F. Hemment and K. J. Reeson Requires Authentication Unlicensed Licensed Download PDF	26
SURFACE MODIFICATION OF SOLID CARBON BY ION IMPLANTATION Masaya Iwaki Requires Authentication Unlicensed Licensed Download PDF	33
ION BEAN INDUCED EPITAXIAL CRYSTALLIZATION AND PLANAR AMORPHIZATION OF SILICON Jan Linnros Requires Authentication Unlicensed Licensed Download PDF	39
ION BEAM MIXING: AMORPHIZATION, ICOSAHEDRAL PHASE AND FRACTAL PATTERN FORMATION Bai-Xin Liu Requires Authentication Unlicensed Licensed Download PDF	51
NITRIDE SYNTHESIS WITH UV-PULSED LASERS: APPLICATIONS IN MICROELECTRONICS AND METALLURGY V. Craciun, A. V. Drigo, G. Leggieri, A. Luches, M. Martino, I. N. Mihailescu and I. Ursu Requires Authentication Unlicensed Licensed Download PDF	57
CHARACTERIZATION OF POLYCRYSTALLINE α-Al₂O₃ IMPLANTED WITH ZIRCONIUM, COPPER OR IRON N. Moncoffre, C. Donnet, G. Marest and J. Tousset Requires Authentication Unlicensed Licensed Download PDF	66
PLASMA FORMATION AND FILM GROWTH BY LASER-INDUCED DEPOSITION TECHNIQUE (LPVD) W. Poape and H. J. Dietze Requires Authentication Unlicensed Licensed Download PDF	73
BANGS PROFILE CALCULATIONS BT DIRECT NUMERICAL SOLUTION OF LINEARIZED BOLTZMAHH TRANSPORT EQUATIONS M. Posselt Requires Authentication Unlicensed Licensed Download PDF	81
PHASE FORMATION BY ION BEAM MIXING OF METAL SYSTEMS B. Rauschenbach Requires Authentication Unlicensed Licensed Download PDF	88
RAPID PHASE TRANSITIONS IN SILICON UNDER PULSED-LASER IRRADIATION W. C. Sinke, A. Polman and P. A. Stolk Requires Authentication Unlicensed Licensed Download PDF	94
THE CURRENT STATUS OF ION IMPLANTATION PROCESS IN INDUSTRIAL APPLICATIONS Piran Sioshansi Requires Authentication Unlicensed Licensed Download PDF	100
ION BEAM PROCESSING FdR SILICON-ON-INSULATOR Wolfgang Skorupa Requires Authentication Unlicensed Licensed Download PDF	106
THIN FILM HIGH TEMPERATURE SUPERCONDUCTORS M. Subotowicz Requires Authentication Unlicensed Licensed Download PDF	113
STIMULATED PHASE TRANSITION IN THE AMORPHOUS SILICON LAYERSINGLE CRYSTAL SILICON SUBSTRATE SYSTEM Requires Authentication Unlicensed Licensed Download PDF	122
IONIZED CLUSTER BEAM DEPOSITION -RECENT PROGRESS IN RESEARCH AND APPLICATIONS Isao Yaaada Requires Authentication Unlicensed Licensed Download PDF	130
SUBMITTED PAPERS
1. IMPLANTATION INTO SILICON
STUDIES OF PRECIPITATE FORMATION IN OXYGEN-IMPLANTED LAYERS OF SILICON A. N. Aleshin, A. A. Malinin and V. N. Mordkovich Requires Authentication Unlicensed Licensed Download PDF	136
STRUCTURAL CHARACTERIZATION OF ION-IMPLANTED SILICON LAYERS BY MEANS OF CROSS-SECTIONAL TEM IMAGING H. Bartsch Requires Authentication Unlicensed Licensed Download PDF	140
GENERATION AND ANNEALING OF POINT DEFECTS IN SILICON AFTER HIGH ENERGY IMPLANTATION A. Hertens and J. Röhrich Requires Authentication Unlicensed Licensed Download PDF	143
IMPURITY EFFECTS AT AMORPHIZATION OF Al AND Ga DOPED ION-BOMBARDED SILICON A. V. Dvurechenskii and V. P. Popov Requires Authentication Unlicensed Licensed Download PDF	146
RAMAN SCATTERING IN HEAVILY DOPED SILICON LAYERS PREPARED WITH LASER ANNEALING V. A. Geisler, R. Grötzschel, A. V. Dvurechenskii, T. V. Kuroohkina and Yu. A. Manzhosov Requires Authentication Unlicensed Licensed Download PDF	149
ELECTRONIC ENERGY LOSS OF IONS IN SILICON AND GERMANIUM J. Hlávka Requires Authentication Unlicensed Licensed Download PDF	152
In situ RECRYSTALLIZATION OF IMPLANTED Si IN A HIGH-VOLTAGE ELECTRON MICROSCOPE D. Hoehl, H. Bartsch, V. Heera, W. Skorupa, M. Voelskow and K. Wollschläger Requires Authentication Unlicensed Licensed Download PDF	155
DEPENDENCE OF Si-SiO₂ INTERFACE STATE DENSITY ON ION IMPLANTATION PROCESS AND ITS EXPLOITATION FOR EVALUATING LOW DOSE ION IMPLANTATION Martin Kejhar Requires Authentication Unlicensed Licensed Download PDF	158
INVESTIGATION OF THE INFLUENCE OF A HIGH OXYGEN OR NITROGEN CONTAMINATION ON THE ELECTRICAL ACTIVATION AND RESIDUAL DEFECT EVOLUTION OF ARSENIC IMPLANTED SILICON LAYERS R. Kogler and D. Baither Requires Authentication Unlicensed Licensed Download PDF	161
LONG-RANGE EFFECT IN ION IMPLANTATION OF SILICON AND ITS ASSOCIATION WITH MECHANICAL STRAIN IN CRYSTAL S. N. Gorin, V. P. Kalinushkin, T. A. Kuzemchenko, A. A. Manenkov and G. N. Mikhailova Requires Authentication Unlicensed Licensed Download PDF	165
ACTIVATION OF PHOSPHORUS IN SURFACE LAYERS OF P⁺-IMPLANTED SILICON UNDER RF PLASMA TREATMENT M. Ya. Valakh, V. S. Lyaenko, A. N. Nazarov, G. Yu. Rudko and A. S. Tkachenko Requires Authentication Unlicensed Licensed Download PDF	169
CRYSTALLOGRAPHIC NATURE OP THE HEXAGONAL SILICON FORMED BY THE HIGH-INTENCITY ION IMPLANTATION S. A. Petrov, F. F. Komarov, A. P. Novikov and V. Yu. Troitsky Requires Authentication Unlicensed Licensed Download PDF	172
APPLICATION OF ION IMPLANTATION TO CHEMICAL MICROSENSORS M.T. Pham, W. Hoffmann, J. Hüller and J. Schöneich Requires Authentication Unlicensed Licensed Download PDF	174
PULSE IMPLANTATION DOPING OF SILICON WITH BORON AND PHOSPHORUS J. Piekoszewski, J. Bialoskozewski, A. Horoderiski, J. Kaczanowski, J. Langner, C. Pochrybniak, A. Turos, Z. Werner and J. Zarqba Requires Authentication Unlicensed Licensed Download PDF	177
SIMULATION OF RANGE PROFILES FOB THE BOSON IMPLANTATION INTO SI02/SI AND SI₃N₄/SIO₂/SI TARGETS M. Posselt and T. Feudel Requires Authentication Unlicensed Licensed Download PDF	180
EPITAXIAL LATERAL OVERGROWTH OF AMORPHOUS CVD SILICON FILMS INDUCED BY ION IRRADIATION M. Voelskow, W. Skorupa, K. Wollschlager, J. Matthai, P. Knothe and H. Bartsch Requires Authentication Unlicensed Licensed Download PDF	183
2. IMPLANTATION AND ANNEALING OF COMPOUND SEMICONDUCTORS
RAPID THERMAL ANNEALING OF ION IMPLANTED GaAs WITH A GRAPHITE STRIP HEATER T. Bachmann, W. Wesch and K. Gärtner Requires Authentication Unlicensed Licensed Download PDF	187
PHYSICAL AND ELECTROPHYSICAL PROPERTIES OF Ge_2x(GaAs)_1-xLAYERS INDUCED BY PULSE ELECTRON BEAM ANNEALING V. I. Baljtjba, V. P. Vobonkdv, A. P. Vjatkin, N. I. Lebedeva and D. E. Psoskdhovsky Requires Authentication Unlicensed Licensed Download PDF	191
MODIFICATION OP ZnSe PROPERTIES BY HIGH CURRENT PULSED ELECTRON BEAMS B.P. Dement’ev, M. B. Kotljarevsky, D. I. Proskurovsky, G. E. Ozur and N. I. Yakubovlch Requires Authentication Unlicensed Licensed Download PDF	194
AMORPHIZATION OF CD-IMPLANTED GAAS J. Krynicki, H. Rzewuski, R. Groetzschel and A. Claverie Requires Authentication Unlicensed Licensed Download PDF	197
Au-Ge/n-GaAs OHMIC CONTACTS BY RAPID THERMAL ANNEALING Skrabka Toaasz and Kong Hyon Choi Requires Authentication Unlicensed Licensed Download PDF	200
APPARATUS FOR INFRARED ANNEALING OP GaAs IN CONTROLLED ATMOSPHERE V. A. Yurchenko, S. V. Slobodich, A. V. Teselkin, V. S. Pivovar and S. V. Chernenko Requires Authentication Unlicensed Licensed Download PDF	203
GaAs-BASED SEMICONDUCTOR COMPOUND SYNTHESIS BY DUAL ION IMPLANTATION V. A. Yurchenko, A. M. Zaitsev, V. I. Khytko, V. S. Pivovar and A. B. Byzhnitsyn Requires Authentication Unlicensed Licensed Download PDF	206
INVESTIGATION OP SPECIFIC FEATURES OF GALLIUM ARSENIDE IMPLANTATION WITH HIGH IOU DOSES V. A. Yurchenko, V. I. Khytko, V. F. Korotov, V. S. Pivovar, A. B. Ryzhnitsyn and T. S. Gancharik Requires Authentication Unlicensed Licensed Download PDF	208
MODIFICATION OF THE InP(100) SURFACE BY ION BEAM J. Zemek and P. Jiřfček Requires Authentication Unlicensed Licensed Download PDF	211
DEFECT OF PROTON BOMBARDMENT INDUCED DETECTS OH THE OPTICAL ABSORPTION OF GaP AND InP C. Ascheron, W. Hörig, H. Neumann and V. F. Orlenko Requires Authentication Unlicensed Licensed Download PDF	215
CHARACTERISTIC PROPERTIES OF HEATING MONOCRYSTALLINE SEMICONDUCTORS BY NANOSECOND LASER PULSES G. M. Gusakov Requires Authentication Unlicensed Licensed Download PDF	217
3. TRANSIENT HEAT TREATMENT OF SEMICONDUCTORS
INVESTIGATION OF THE DYNAMICS OP PULSED LASER AM NEALING OF ION-IMPLANTED SILICON BY THE PICOSECOND TRANSIENT GRATING TECHNIQUE R. Baltramiejünas, R. Gaška, E. Kuokštis, V. Netikšis and M. Petrauskas Requires Authentication Unlicensed Licensed Download PDF	220
LASER INDUCED PHASE TRANSFORMATION IN SEMICONDUCTORS Yu. A. Bumay, D. S. Domanewskii, N. E. Domorod and A. G. Ulyashin Requires Authentication Unlicensed Licensed Download PDF	223
HEATING OF SEMICONDUCTORS BY ION BEAMS AND ION-BEAM INDUCED PROCESSES Yu. A. Bumay, D. S. Domanevskii, N. E. Domorod, A. B. Ulyashin and N. V. Shlopak Requires Authentication Unlicensed Licensed Download PDF	226
'THE FORMATION 07 S-DOPED SILICON LASERS BY PUISED HEATING RECRYSTALLIZATION A. V. Dvurechenskii, F. Grotzachel, B. Z. Kanter, Yu. A. Manzhosov, A. I. Niklforov, P. L. Novikov and S. I. Romanov Requires Authentication Unlicensed Licensed Download PDF	229
INTERMEDIATE CRYSTALLIZATION OF ION-IMPLANT ED SILICON DURING NANOSECOND LASER ANNEALING G. D. Ivlev Requires Authentication Unlicensed Licensed Download PDF	231
ARSENIC SUBLIMATION AND DIFFUSION AT RAPID ELECTRON BEAM ANNEALING OF IMPLANTED SILICON R. Grótzschel, V. A. Kagadey, P. Knothe, O. I. Proekuroveky and N. I. Lebedeva Requires Authentication Unlicensed Licensed Download PDF	234
INFLUENCE OF IMPLANTED SILICON LAYERS RECRYSTALLIZATION TYPE ON THE MECHANISM OF As DEACTIVATION AT ELECTRON BEAM ANNEALING R. Grötzschel, V. A. Kagadey, P. Knothe, N. I. Lebedeva, G. E. Ozur and D. I. Proakurovaky Requires Authentication Unlicensed Licensed Download PDF	237
ANISOTROPIC LOCAL MELTING 0? IMPLANTED SILICON BI 0.05 - 15 B DURATION INCOHERENT LI (ST PULSES Ta. V. Pattachov and I. B. Khaibullin Requires Authentication Unlicensed Licensed Download PDF	240
ANNEALING OF THIN ARSENIC IMPLANTED SILICON LAYERS WITH FLASH GALOGEN LAMP AND RF GAS DISCHARGE A. N. Nazarov and V. S. Lysenko Requires Authentication Unlicensed Licensed Download PDF	243
RAPID THERMAL ANNEALING OF PROTON TRASMUTATION DOPED SILICON F. P. Korshunov, A. A. Pavienko, N. A. Sobolev and A. V. Voevodova Requires Authentication Unlicensed Licensed Download PDF	246
DEFECT PRODUCTION AND ANNEALING IN 11,5 MeV ELECTRON- AND ⁶⁰Co-Ɣ IRRADIATED NTD-SILICON E. Koch, H. Lemke, A. Müller and L. Prager Requires Authentication Unlicensed Licensed Download PDF	249
4. SILICIDES
INVESTIGATION 07 THE NEW PHASE FORMATION IK NiSi-Si SYSTEM S. G. Gorbachenko, A.V., Zenkevich, I. D. Khabelaehvili, V. S. Kulikauskas and T. N. Nevolin Requires Authentication Unlicensed Licensed Download PDF	252
PHASE FORMATION UT LASER DEPOSITED Ta_xSi_1-xFILMS I. D. Khabelashvili, V. S. Eolikaaakas, T. H. Hevolin, V. B. Prokopenko and A. V. Zenkevich Requires Authentication Unlicensed Licensed Download PDF	255
LASER DIRECT WRITING OF CONDUCTIVE THIN FILMS FROM GASEOUS PHASES F. Gänsicke, K. Zimmer, G. Reiße, B. Lämmel and H. Johansen Requires Authentication Unlicensed Licensed Download PDF	258
FORMATION OF A SILICIDE/NITRIDE LAYER SYSTEM BK N⁺ IMPLANTATION B. Weber, J. Danilovich, K. Gärtner and A. Novikov Requires Authentication Unlicensed Licensed Download PDF	261
MoSi₂ FORMED BY ION IMPLANTATION THROUGH METAL CITIO TECHNIQUE E. Vetter, W. Grünewald, J. Tolonics and T. Geßner Requires Authentication Unlicensed Licensed Download PDF	264
QUANTITATIVE BBS ANALYSIS OF SILICIDES AND SILICIDE OXIDES USING BUMP J. M. Gilpérez, A. Climent, J. M. Martínez-Duart and J. Perrière Requires Authentication Unlicensed Licensed Download PDF	268
REDISTRIBUTION OF B AND As BY RTP AFTER IMPLANTATION INTO TiSi₂ ON Si D. Panknin, E. Wieser, L. Drechsler, E. Bugiel, F. Richter, F. Wolf, E. Landi and S. Solmi Requires Authentication Unlicensed Licensed Download PDF	271
5. IMPLANTATION INTO METALS
SURFACE RELIEF DEVELOPMENT AND FATIGUE CRACK INITIATION IN IMPLANTED AND NONIMPLANTED METALS C. Blochwitz and E. Preuß Requires Authentication Unlicensed Licensed Download PDF	275
CHANGE OP MECHANICAL PROPERTIES OF Al-Mg ALLOY UNDER THE ION BEAM IRRADIATION V. P. Goltsev, G. Götz, V. V. Khodasevich, V. V. Uglov and G. H. Choi Requires Authentication Unlicensed Licensed Download PDF	278
STRUCTURAL-PHASE CHARGES IN PE FILMS IRRADIATED SUCCESSIVELY BY NITROGEN AND BORON IONS V. P. Goltsev, V. M. Drako, V. V. Khomsevich and V. V. Uglov Requires Authentication Unlicensed Licensed Download PDF	281
IMPURITY REDISTRIBUTION DURING HIGH TEMPERATURE CREEP Of Sb⁺-IMPLANTED Al-ALLOY V. P. Goltsev, S. I. Zhukova and I. V. Kasko Requires Authentication Unlicensed Licensed Download PDF	284
TEE BORON IMPLANTATION EFFECT ON STRUCTURAL-PHASE CHANGES IN THE SYST9I Zr-O/Ni PRODUCED BY ATOMIC MIXING V. P. Goltsev, G. Götz, V. V. Khodaseyich, I. I. Erikhodko and V. V. Uglot Requires Authentication Unlicensed Licensed Download PDF	287
IMPLANTATION INDUCED TEXTURE K. Helming and B. Rauschenbach Requires Authentication Unlicensed Licensed Download PDF	290
SYNTHESIS OP COMPOUNDS IN MOLYBDENUM DURING ION IMPLANTATION COMBINED WITH THERMAL AND PULSED ELECTRON ANNEALING Kh. R. Kazdaev, M. T. Akchulakov and E. M. Bayadilov Requires Authentication Unlicensed Licensed Download PDF	293
PRACTICAL APPLICATIONS OF ION IMPLANTATION FOR WEAR PROTECTION A. Kolltsch, E. Richter and U. Scholz Requires Authentication Unlicensed Licensed Download PDF	296
RESIDUAL STRAIN ANALYSIS OF Ar+ and N2+ IMPLANTED 304 SS D. C. Kothari, L. Guzman, C. Cestari, L. Lutterotti and P. Scardi Requires Authentication Unlicensed Licensed Download PDF	299
WEAR RESISTANT COATINGS PRODUCED BY C⁺ IMPLANTATION C. Neelmeijer, P. Knothe, M. Posselt and E. Richter Requires Authentication Unlicensed Licensed Download PDF	302
STRUCTURE-PHASE TRANSPORTATION IN BIMETALLIC SYSTEMS UNDER POWER PULSE INFLUENCE S.V Plotnikov, Y. G. Busin, I . A. Stuckerfc, G. E. Remnjev and A A. D. Pogrebnjak Requires Authentication Unlicensed Licensed Download PDF	305
STRUCTURAL AND PHASE CHANGES IN NEAR SURFACE LAYERS OP HIGH POWER ION BEAM IRRADIATES HARD ALLOYS A. D. Pogrebnjak, O. Radjabov, Sh. M. Ruzimov, A. Emiraliev and V. P. Yanovski Requires Authentication Unlicensed Licensed Download PDF	308
EFFECT OF DEFECT STRUCTURE ON INCREASED MECHANICAL AND FRICTION PROPERTIES IN HIGH POWER ION BEAM IRRADIATED α-Fe A. D. Pogrebnjak, Yu. P. Sharkeevt, D. V. Lychagin, M. A. Makhmudov, G. V. Pushkareva, I. G. Romanov and V. N. Kolodii Requires Authentication Unlicensed Licensed Download PDF	311
AMORTIZATION MECHANISMS IN ION-BOMBARDED METALLIC ALLOYS: EXPERIMENTAL CONFIRMATION OF MODEL PREDICTIONS L. Thomé, A. Benyagoub and F. Pons Requires Authentication Unlicensed Licensed Download PDF	315
6. SURFACE MODIFICATION OF METALS AND OTHER MATERIALS
THE ALLOYING OF Fe AND V BASE WITH W, Nb AND AI BY ION-BEAM MIXING L. Choupyatova, I. A. Komarovsky, T. E. Peksheva and I. G. Murzin Requires Authentication Unlicensed Licensed Download PDF	321
SURFACE MODIFICATION OF STEELS BY IRRADIATION OF HIGH CURRENT ELECTRON PULSE WITH NANOSECOND DURATION E. Dancheva and I. Trifonov Requires Authentication Unlicensed Licensed Download PDF	324
THE PHYSICAL PROPERTIES OF LAYERS IN GLASSES FORMED BY ION MIXING AND IMPLANTATION A. A. Deshkovskaya, V. P. Komar and I. V. Skornyakov Requires Authentication Unlicensed Licensed Download PDF	327
STRESS WAVES AND STRUCTURAL MODIFICATIONS IN METAL AND ALLOYS AT HIGH CURRENT PULSED ELECTRON BEAU IRRADIATION V. I. Itin, S. V. Lykov, G. A. Mesyats, P. B. Popov, D. I. Proskuroveky and V. P. Rotahtein Requires Authentication Unlicensed Licensed Download PDF	331
MELTING AND MIXING OF FINE METAL LAYERS AFTER EXPOSURE TO LOW - ENERGY HIGH CURRENT ELECTRON BEAM Yu. Yu. Krjuchkov, V. M. Milutin, N. N. Nikitenkov, A. D. Pogrebnjak, A. A. Garapadskii, G. E. Ozhur and D. I. Proakurovskii Requires Authentication Unlicensed Licensed Download PDF	334
EFFECTS OF ION FLOWS ON STRUCTURE AND PROPERTIES OF CERTAIN INORGANIC DIELECTRICS V. F. Pichugin, A. N. Feodorov and A. J. Shmyrin Requires Authentication Unlicensed Licensed Download PDF	337
ION BEAM MIXING OF Al/Fe BINARY SYSTEMS B. Rauschenbach, R. Küchler, M. Posselt, P. Knothe and R. Dietsch Requires Authentication Unlicensed Licensed Download PDF	340
LASER BEAM MODIFICATION OF OPTICAL FILMS O. Schäfer, B. Brauns, P. Höfner, R. Wolf, B. Steiger and J. Bärinann Requires Authentication Unlicensed Licensed Download PDF	343
MIXING OF Cu - Ni SYSTEM BY GAS - METAL ION BEAM G. V. Potemkin, A. E. Ligachev, G. M. Novikova, O. S. Kuzmin and V. P. Yanovskii Requires Authentication Unlicensed Licensed Download PDF	346
STRUCTURE TRANSFER AND PHASE CHANGE BY GENERATION OF THIN FILMS BY MEANS OF LASER-INDUCED DEPOSITION METHODS H. J. Dietze, S. Becker, G. Keßler and V. Pompe Requires Authentication Unlicensed Licensed Download PDF	349
EMISSION Of EXCITED MOLECULES DURING ION BOMBARDMENT Of METALS S. S. Pop and Yu. A. Bandurin Requires Authentication Unlicensed Licensed Download PDF	352
CO₂ LASER TREATMENT OF ZnO THIN FILM OPTICAL WAVEGUIDES M. Bertolotti, A. Ferrari, M. Laschena, M. Rossi, L. S. Quian, F. Quaranta and A. Valentini Requires Authentication Unlicensed Licensed Download PDF	354
7. MATERIALS DEPOSITION
RESIDUAL GAS ADSORPTION AT THE FILM-SUBSTRATE INTERFACE DURING ION-BEAM ASSISTED DEPOSITION J. Budinavičius, L. Pranevičius and S. Tamulevičius Requires Authentication Unlicensed Licensed Download PDF	357
ANNEALING OF SURFACE AND INTERFACE LAYERS CAUSED BY THE PLASMA/SUBSTRATE INTERACTION DURING THE DEPOSITION OF PECVD a-Si:H FILMS G. Suchaneck, R. Deltschew, K. Schade and M. Albert Requires Authentication Unlicensed Licensed Download PDF	360
SCANNING CO₂ LASER INDUCED OXIDATION REACTION IN Ti THIN FILM J. Dudonis and D. Furmonavičius Requires Authentication Unlicensed Licensed Download PDF	363
ION BEAM ASSISTED DEPOSITION OF Al ON Fe D. C. Kothari, L. Guzman, A. Tomasi, A. Miotello, A. Gupta and G. Principi Requires Authentication Unlicensed Licensed Download PDF	367
LASER LIGHT INDUCED OXIDATION OF METALS AND SEMICONDUCTORS IN EXTERNAL ELECTRIC FIELD R. Vajtai, L. Nanai and I. Hevesi Requires Authentication Unlicensed Licensed Download PDF	370
METHODS INVESTIGATION OP METAL-POLYMER COMPOSITION TEMPERATURE STABILITY INCREASING V. A. Petrov, G. H. Kolshlbaeva, A. O. Savchenko and V. I. Kopchenov Requires Authentication Unlicensed Licensed Download PDF	373
CATHODIC ARC TECHNIQUE - PRESENT STATE AND DEVELOPMENTS B. Rother, J. Vetter and J. Siegel Requires Authentication Unlicensed Licensed Download PDF	376
MODIFICATION OP ADHESION PROPERTIES OP SOLID FILMS BY ION IMPLANTATION E. M. Shpilevsky, A. A. Deshkovskaya and I. A. Dilk Requires Authentication Unlicensed Licensed Download PDF	379
FILM DEPOSITION BY LASER INDUCED VACUUM ARC EVAPORATION Requires Authentication Unlicensed Licensed Download PDF	382
8. SILICON ON INSULATORS
HETEROGENEOUS ION SYNTHESIS OP INSULATING LAYERS IN SILICON A.B. Danilin, V. N. Mordkovich and M. Y. Barabanenkov Requires Authentication Unlicensed Licensed Download PDF	385
A TWO-DIMENSIONAL MODEL OF SOI STRUCTURES CRYSTALLIZATION BY PULSE NANOSECOND HEATING L. N. Aleksandrov, V. Iu. Balandin, A. V. Dvurechenskii and O. A. Kulyasova Requires Authentication Unlicensed Licensed Download PDF	389
TEMPERATURE DISTRIBUTION IN MELT AND IN GROWING CRYSTAL DURING SILICON-ON—INSULATOR FORMATION BY MILLISECOND HEATING S. N. Kolyadenko, A.V. Dvurechenskii, D. Stock and V. A. Zinovjev Requires Authentication Unlicensed Licensed Download PDF	392
SOI STRUCTURES FORMATION BY PULSED HEATING S. H. Kolyadenko, A. V. Dvurechensky and A. L. Vasilyev Requires Authentication Unlicensed Licensed Download PDF	395
FORMATION MECHANISMS AND STRUCTURES OP BURIED Si₃N₄ LAYERS, PRODUCED BY HIGH-INTENSITY IMPLANTATION AND RAPID THERMAL ANNEALING R. V. Gribkovskii, P. P. Komarov and A. P. Novikov Requires Authentication Unlicensed Licensed Download PDF	398
THE HOLE OF ADDITIONAL NITROGEN TRAPS IN ION SYNTHESIS OP SILICON NITRIDE BURIED LAYERS G. A. Kachurin, I. E. Tyschenko, V. P. Popov, A. E. Plotnikov and S. A. Tija Requires Authentication Unlicensed Licensed Download PDF	401
SYNTHESIS OF Si₃N₄ BURIED LAYERS AT LOW DENSITIES OP ION CURRENT AND INDEPENDENT HEATING OF SILICON TARGETS G. A. Kachurin, I. E. Tyschenko, A. E. Plotnikov and V. P. Popov Requires Authentication Unlicensed Licensed Download PDF	404
OPTIMIZED SO I-PROCESS I NB BY ION BEAM SYNTHESIS OF BURIED SILICON OXYNITRIDE IN SILICON W. Skorupa, M. Voelskow, R. Grötzschel, J. Albrecht, Jan Vanhellemonta and Ann De Veirman Requires Authentication Unlicensed Licensed Download PDF	407
STRUCTURAL CHARACTERIZATION OF THICK ZONE-MELTED SOI-LAYERS K. Hoeppner, B. Tillack, R. Banisch and H. H. Richter Requires Authentication Unlicensed Licensed Download PDF	411
THE INVESTIGATION OF ION BEAM SYNTHESISED SILICON OXYNITRIDES BY IR-SPECTROSCOPY K. Wollschläger, W. Skorupa and U. Kreißig Requires Authentication Unlicensed Licensed Download PDF	413
9. DIAGNOSTIC AND ION BEAM EQUIPMENTS
HIGH DOSE IMPLANTATION OP NITROGEN INTO SILICON: RBS AND NUCLEAR REACTIONS MEASUREMENTS V. Y. Arbuzov, I. Y. Grande, V. P. Korobeinlkov, T. M. Pyatkova, V. N. Baghaev and T. I. Starikova Requires Authentication Unlicensed Licensed Download PDF	416
HYDROGEN INCORPORATION IN PROTON-IMPLANTED ELEMENTAL AND COMPOUND SEMICONDUCTORS C. Ascheron, D. Lehmann, C. Neelmeijer and A. Schindler Requires Authentication Unlicensed Licensed Download PDF	419
FOCUSED-ION-BEAM MODIFIED STRUCTURES OF METAL ON GLASS L. Bischoff, T. Chudoba and F. K. Naehring Requires Authentication Unlicensed Licensed Download PDF	423
IN SITU XPS AND LEED STUDY OF Si/SiC>2 INTERFACE CHANGES INDUCED BY ArF EXCIMER LASER IRRADIATION V. Cháb, P. Jiřífiček, J. Kubátová and I. Lukeš Requires Authentication Unlicensed Licensed Download PDF	426
HfllSSION PROPERTIES OP ALLOY GOLD-BERYLLIUM FIELD IOff SOURCE Novak Drandarov and Borlslav Nikolov Requires Authentication Unlicensed Licensed Download PDF	429
LOW ENERGY ION MICROSCOPE FOR DIAGNOSTICS AND PREPARATION OF MICROELECTRONIC STRUCTURES WITHIN AN MULTIANALYSIS SYSTEM W. Driesel and F. K. Naehring Requires Authentication Unlicensed Licensed Download PDF	432
DR37* TUBES RESOHAJtt ACCELERATORS VlfH ACCELKBATIHG vxbzs voeusnra voe the IOS iwtjjjtatioh A. lf. Antropov, V. T. Belousov, B.Yu. Bogdenovich, M. M. Gavrilov, A. A. Kostjunin, S. A. Minaev and A. V. Shalnov Requires Authentication Unlicensed Licensed Download PDF	435
QSZMS M M PRORAINO IN THBRHILLY OXIDIZBD POLYSILICON LAYBRS U. Gunot and B. Miller Requires Authentication Unlicensed Licensed Download PDF	438
PERFORMANCE OF A BRAGG IONIZATION CHAMBER FOR DEPTH PROFILING AND SURFACE ANALYSIS E. Hentschel, R. Kotte, H. G. Ortlepp, F. Stary and D. Wohlfarth Requires Authentication Unlicensed Licensed Download PDF	442
A LITHIUM LIQUID METAL ION SOURCE K. Hesse and F. K. Nachring Requires Authentication Unlicensed Licensed Download PDF	445
PULSE EXPLOSION ION BEAM SOURCE WITH ONE PULSE REGIME FOR SURFACE MODIFICATION OF MATERIALS S. A. Korenev Requires Authentication Unlicensed Licensed Download PDF	448
ULTRASONIC SURFACE WAVES FOR STUDYING THE PROPERTIES OF THIN FILMS Requires Authentication Unlicensed Licensed Download PDF	451
PROBE MEASUREMENTS IN LASER PRODUCED PLASMA H. Maller, P. Siairoth and K. Metzig Requires Authentication Unlicensed Licensed Download PDF	454
PLASMATRON ION SOURCE FOR ION IMPLANTATION H. Reuther and J. Strümpfe Requires Authentication Unlicensed Licensed Download PDF	457
CEMS STUDY ON ALUMINIUM IMPLANTED IRON H. Reuther and E. Richter Requires Authentication Unlicensed Licensed Download PDF	460
CBMS HKASÜRÖÖSHTS ON ION IMPLANTKD TOOL STEELS H. Reutberg, K. Richter and I. S. Szüce Requires Authentication Unlicensed Licensed Download PDF	463
LOW-FREQUENCY CAPACITANCE-VOLTAGE CHARACTERISTICS OF A SIS STRUCTURE WITH A THIN SILICON SUBSTRATE N. Sieber and G. Otto Requires Authentication Unlicensed Licensed Download PDF	466
INVESTIGATION OF ARSENIC IMPLANTED SILICON BY OPTICAL REFLECTOMETRY Vi. Stavrov, R. Varbanov, O. Vasiliev and D. Berova Requires Authentication Unlicensed Licensed Download PDF	469
HIGH DOSS ION IMPLANTATION SISTEM FOB COMPOUND SEMICONDUCTORS V. A. Yurchenko, A. M. Zaitsev and V. P. Checha Requires Authentication Unlicensed Licensed Download PDF	472
AN OXYGEN ION SOURCE OF DUOPLASMATRON TYPE R. Hentschel and D. Henke Requires Authentication Unlicensed Licensed Download PDF	474
10. HIGH TEMPERATURE SUPERCONDUCTORS
LASER-INDUCED PLASMA DEPOSITION OF THIN HIGH-TEMPERATURE SUPERCONDUCTING Bi-Sr-Ca-Cu-0 FILMS S. Becker and H. J. Dietze Requires Authentication Unlicensed Licensed Download PDF	477
EXPERIMENTAL STUDIES OP EFFECT OF HIGH CURRENT PULSE ELECTRON AND ICARBON ION BEAMS ON THE HIGH TEMPERATURE Y-Ba-Cu-O, Bi-Ca-Sr-Cu-0 SUPERCONDUCTORS S. A. Korenev, V. V. Sikolenko and A. Chernakova Requires Authentication Unlicensed Licensed Download PDF	480
ENHANCEMENT OF T_c Y-Ba-Cu-O THIN FILMS AFTER PROTON IRRADIATION A. A. Nikonov, G. V. Sotnikov and A. S. Tokarev Requires Authentication Unlicensed Licensed Download PDF	483
PREPARATION OF SUPERCONDUCTING THIN FILMS BY ION BEAM MIXING B. Rauschenbach, M. Erfurth, J. Heydenreich and K. Hohauth Requires Authentication Unlicensed Licensed Download PDF	486
FORMATION Of HIGH-TEMPERATURE SUPERCONDUCTING Bi-Sr-Ca-Cu-O FILMS BY ION-BEAM SPIKE SPUTTERING A. V. Suvorov, V. E. Chelnokov, G. M. Gusinsky, M.E. Leshchenko, V. N. Makarov, D. D. Prokofiev, V. V. Tretiakov and T. B. Zohukova Requires Authentication Unlicensed Licensed Download PDF	489
PROPERTIES Of SUPERCONDUCTING FILMS Bi-Sr-Ca-Cu-0 IMPLANTED BY OXIGEN IONS A. V. Suvorov, V. E. Chelnokov, M. E. Leshchenko, V. H. Makarov, D. D. Prokofiev and I. B. Zchukova Requires Authentication Unlicensed Licensed Download PDF	492
FORMATION OF THIN SUPERCONDUCTING FILMS BY Cu⁺ IMPLANTATION V. Yu. Petukhov, L. S. Grigorjev, E. F. Kukovitsky and I. B. Khaibullin Requires Authentication Unlicensed Licensed Download PDF	495
SUPERCONDUCTING TBAzCUsOz FILMS OR SILICON PREPARED BY LPVD M. Panzner, H. Müller, G. Keßler, W. Pompe, S. Vellmar, H. Vinzelberg, K. Fischer, B. Schöneich and C. Ritscheli Requires Authentication Unlicensed Licensed Download PDF	497
11. FUNDAMENTALS
COMPUTATION OF THE DISTRIBUTION OF RADIATION AND TEMPERATURE DURING RAPID THERMAL PROCESSING Rolf-Reiner Bartl Requires Authentication Unlicensed Licensed Download PDF	501
DEFECT PROFILES AND COMPOSITION DISTURBANCES INDUCED BY ION IMPLANTATION A. F. Burenkov and G. G. Konopljanik Requires Authentication Unlicensed Licensed Download PDF	504
ENERGY BALANCE IN NONEQUILIBRIUM GRADIENT-ZONE CRYSTALLIZATION IN A SEMICONDUCTOR B. S. Evseev Requires Authentication Unlicensed Licensed Download PDF	507
A VACANCY DIFFUSION MODEL OF ION BEAM INDUCED EPITAXIAL CRYSTALLIZATION V. Hee Requires Authentication Unlicensed Licensed Download PDF	510
PECULIAR FEATURES OF DEFECT PRODUCTION DUE TO HIGH ENERGY ION IMPLANTATION L. A. Kazak, F. G. Neahov, V. E. Semyannikov and A. R. Urmanov Requires Authentication Unlicensed Licensed Download PDF	513
COMPUTER SIMULATION OF ION MOTION IN MULTILAYERED HETEROSTRUCTURES K. Lenkeit and A. Pirrwitz Requires Authentication Unlicensed Licensed Download PDF	516
THE ROLE OF ABSOLUTE AND CONSTITUTIONAL SUPERCOOLING IN ZONE - MELTING - RECRYSTALLIZATION OF SILICON FILMS A. B. Limanov and L. V. Musatova Requires Authentication Unlicensed Licensed Download PDF	519
TIME EVOLUTION OF THE ELECTRON OAS IN A LASER-INDUCED PLASMA - A THEORETICAL STUDY R. Muller and W. Stiller Requires Authentication Unlicensed Licensed Download PDF	522
THE INFLUENCE 01* THE LIGHT POLARIZATION ON RESONANT LASER-INDUCED DIFFUSION IN CRYSTALS V. N. Pavlovich Requires Authentication Unlicensed Licensed Download PDF	525
RESONANT LASER-INDUCED DIFFUSION OF OXYGEN IN SILICON M. V. Artsimovich, A. N. Baranov, E. M. Kuclriavtsev, I. F. Mogilnik, V. N. Pavlovich, B. N. Romanuk, V. I. Soroka, V. V. Tokarevski and S. D. Zotov Requires Authentication Unlicensed Licensed Download PDF	528
IMPLANTATION EFFECTS OF LASER EVAPORATED PARTICLES A. Pompe, M. Bobeth and M. Posselt Requires Authentication Unlicensed Licensed Download PDF	531
AN "INSTRUMENT FUNCTION" OF SECONDARY ION EMISSION B. T. Popor Requires Authentication Unlicensed Licensed Download PDF	534
ENERGY AND ANGULAR DISTRIBUTIONS OF IONS BACKSCATTERED FROM THE SIDEMALLS DURING THE IMPLANTATION INTO DEEP TRENCHES M. Poshelt and G. Otto Requires Authentication Unlicensed Licensed Download PDF	537
THE MECHANISMS OP ATOMIC MIGRATIONS IN IMPLANTED FILMS E. M. Shpilevsky Requires Authentication Unlicensed Licensed Download PDF	540
MODELING OF THE NITROGEN HIGH DOSE IMPLANTATION INTO SILICON FOR BURIED INSULATING LAYERS E. Sobeslavsky and W. Skorupa Requires Authentication Unlicensed Licensed Download PDF	543
NUMERICAL SIMULATION OF CHARGED-PARTICLE BEAMS DYNAMICS IN IONIC-OPTICAL SYSTEMS WITH PLASMA EMITTERS OF TECHNOLOGICAL ION SOURCES A. F. Stekolnikov and O. M. Ivanov Requires Authentication Unlicensed Licensed Download PDF	546
ON THE MECHANISM OF ION-STIMULATED CRYSTALLIZATION N. P. Stepina, G. A. Kachurin, S. I. Romanov, V. P. Popov and V. Sh. Aliev Requires Authentication Unlicensed Licensed Download PDF	549
DECOMPOSITION OF SOLID SOLUTIONS UNDER ION IRRADIATION Yu. V. Trushin Requires Authentication Unlicensed Licensed Download PDF	552
PHASE DIAGRAMS OF BINARY ALLOYS UNDER IRRADIATION A. A. Turkin and A. S. Bakaj Requires Authentication Unlicensed Licensed Download PDF	555
THE ENERGY ACCUMULATION IN SOLIDS IRRADIATED BY HIGH POWER BEAMS OP CHARGED PARTICLES A. N. Valyaev Requires Authentication Unlicensed Licensed Download PDF	558
NUCLEATION A? VARYING TEMPERATURES D. Wolff and H. D. Geiler Requires Authentication Unlicensed Licensed Download PDF	561
MODELLING OP PHASE TRANSFORMATIONS IN AMORPHOUS SILICON BY NANOSECOND PULSED-LASER IRRADIATION S. P. Zhvavyi and O. L. Sadovskaya Requires Authentication Unlicensed Licensed Download PDF	564
ELASTIC WAVE GENERATION IN THE CONTINUUM BY A TUBULAR BEAM OP CHARGED PARTICLES I.V. Baryakhtar, Yu. V. Filimonov, Eh. V. Lysenko, Yu. V. Tkach and V. T. Uvarov Requires Authentication Unlicensed Licensed Download PDF	567
NUMERICAL CALCULATION OP THERMAL PROCESSES IN LASER PROCESSING OP SEMICONDUCTOR MATERIALS Ya. V. Bobitski, Z. Yu. Gotra, I. V. Demkovich and M. M. Semerak Requires Authentication Unlicensed Licensed Download PDF	569
A MODEL OP DOPAND REDISTRIBUTION UNDER LASER RECRYSTALLIZATION Ya. V. Bobitski, Z. Fu. Gotra, Fan Tan and I. V. Demkovich Requires Authentication Unlicensed Licensed Download PDF	572
MIS-Transistors in thin polycrystalline silicon and applications in liquid crystal displays and three dimensional integrated circuits S. Wagner, Th. Otto and F. Neubert Requires Authentication Unlicensed Licensed Download PDF	575
LATE PAPER
A MIXED BALLISTIC AND THERMODYNAMIC DESCRIPTION OF ION-BEAM MIXING Roger Kelly Requires Authentication Unlicensed Licensed Download PDF	579
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Physical Research Requires Authentication Unlicensed Licensed Download PDF	591

Language: German
Publisher: De Gruyter
Original publisher: Akademie-Verlag Berlin
Edition: Reprint 2021
Audience: College/higher education;
Pages
- Main content: 594

eBook

Published: February 7, 2022
ISBN: 9783112575666

Hardcover

Published: January 14, 1990
ISBN: 9783112575659